Title:
APPARATUS AND METHOD FOR REDUCING ALPHA PARTICLES
Document Type and Number:
Japanese Patent JP2755360
Kind Code:
B
Abstract:
PURPOSE: To protect the active regions of a semiconductor device from radioactive alpha rays, emitted from the semiconductor chip itself.
CONSTITUTION: An alpha particle shielding wall 205 (made of electrically insulating material and conductive material) utilizes known attenuating effect of the alpha particle barrier 205, such as a quartz and polyimide insulator and a conductive stud 206 (which also absorbs alpha particles) such as a stud, made of copper to increase the vertical distance between an alpha particle source (e.g. C4 pad of Pb/Sn) 207 and a silicon surface 202, on which the active region 203 of an integrated circuit is formed. By sufficiently increasing the distance and further inserting a new alpha particle absorbing material 205 into an area between the contact pad 207 (major source of alpha radioactive rays in a semiconductor module) and the semiconductor device 203, alpha particles that have large effects on the semiconductor device 203 can be avoided.
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Inventors:
Chidambarrao, Dureseti
Murley, Philip Clyde
Nijhuis, Rolf Henk
Robbins, Gordon J.
Srinivasan, Gurumakonda Ramasam
Walters, Timothy Lawton
Murley, Philip Clyde
Nijhuis, Rolf Henk
Robbins, Gordon J.
Srinivasan, Gurumakonda Ramasam
Walters, Timothy Lawton
Application Number:
JP1992000322809
Publication Date:
March 06, 1998
Filing Date:
November 06, 1992
Export Citation:
Assignee:
INTERNATL BUSINESS MACH CORP <IBM>
International Classes:
H01L23/522; H01L21/60; H01L21/768; H01L23/49; H01L23/556; (IPC1-7): H01L21/92