Title:
装置の構成要素から汚染粒子を除去する装置および方法
Document Type and Number:
Japanese Patent JP7186230
Kind Code:
B2
Abstract:
An apparatus (300) for removing contaminant particles (205) from a component (202, 204) of an apparatus (140, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region (301) for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.
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Inventors:
Mars, Tim, Peter, Johann, Herald
Van Hout, Bartholomews, Martinus, Johannes
Van Buell, Henriks, Wilhelms, Maria
Zutout, Floris
Van Hout, Bartholomews, Martinus, Johannes
Van Buell, Henriks, Wilhelms, Maria
Zutout, Floris
Application Number:
JP2020536034A
Publication Date:
December 08, 2022
Filing Date:
November 29, 2018
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
B03C3/02; B03C3/68; B03C3/74; G03F7/20
Domestic Patent References:
| JP2003224067A | ||||
| JP11087457A | ||||
| JP2008277480A | ||||
| JP2011519156A | ||||
| JP54006929Y2 | ||||
| JP2004207740A | ||||
| JP2011099156A | ||||
| JP2006228862A | ||||
| JP2011040464A | ||||
| JP2007296488A |
Foreign References:
| US6526997 | ||||
| CN105964626A |
Attorney, Agent or Firm:
Morishita Kenki
Takeshi Aoki
Takeshi Aoki