APPARATUS AND METHOD FOR SUBSTRATE CARRY-IN/OUT

Japanese Patent JP3909597

B2

PROBLEM TO BE SOLVED: To carry in and out a substrate rapidly using a simple structure.
SOLUTION: A storage container 10 has substrate support sections 2 which are formed as vertically separated from each other to horizontally place substrates A, and a carry-in/out entrance 3 which is formed on the side thereof to carry in and out the substrates A in the horizontal directions. A substrate transfer apparatus 1 is for carrying in and out the substrates A to and from the storage container 10. The substrate transfer apparatus 1 comprises a substrate-holding mechanism 30, which is equipped with a placement table 31 located adjacently to the carry-in/out entrance 3 outside the storage container 10, and a holding member 32, which is so installed as to be movable on the placement table 31 in a direction of carrying in and out the substrates A and holds one end of the substrates A supported by the substrate support sections 2. In the upper section of the placement table 31, a substrate support means 37 is installed which supports the substrates in such a manner that the substrates A can be moved in the carrying-in/out direction. A method of carrying in and out the substrates by means of the substrate carry-in/out apparatus 1 is also provided.

Kitazawa Hora

JP2003296454A

April 25, 2007

August 20, 2003

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Shinko Electric Co., Ltd.

B65G49/06; H01L21/677; B65G49/07; H01L21/68; (IPC1-7): H01L21/68; B65G49/06; B65G49/07

JP8166568A
JP8037220A
JP11349141A
JP2002167038A
JP2002261145A

Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama

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