To provide an apparatus for transporting a substrate which holds the substrate without causing waves on the substrate surface of a substrate to be processed and secures a substrate effective region.
The apparatus for transporting the substrate includes: a floating stage 22 for floating a substrate G at different heights; a pair of substrate carriers 26 provided movably along guide rails 25 disposed in parallel at left and right sides of the floating stage 22; a substrate holding member 24 which is provided along a substrate transport direction on the side face of the substrate carriers 26, and which is formed to be at least the length of the substrate effective region G1 at the side edge part of the substrate G to be processed, and can freely detachably sucking and holding the side edge part of the substrate from below; and an alignment means 65 which is provided with a centering member 67 provided so as to be freely moved forward and backward for a prescribed distance from the side face of the substrate carrier 26 to the side end part of the substrate G, and which abuts the centering member 67 to the side end part of the substrate G mounted on the substrate holding member 24 to thereby move the substrate G to a prescribed position.
MOTODA KIMIO
SHINOZAKI MASAYA
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