To provide a cleaning/drying apparatus or a cleaning/drying method capable of effective cleaning and drying in a short time irrespective of varieties of configurations of articles to be cleaned such as mechanical parts and electronic parts.
A cleaning/drying apparatus 1 includes in the order of a flow of an article to be cleaned a transfer apparatus 11, an introduction chamber 4, a cleaning tank 5, a rinse tank 6, a drying chamber 7, a discharge chamber 15, and a discharge apparatus 12. A movement of an article containing basket from the introduction chamber 4 to the cleaning tank 5, from the cleaning tank 5 to the rinse tank 6, from the rinse tank 6 to the drying chamber 7, from the rinse tank 6 to the drying chamber 7, and from the drying chamber 7 to the discharge chamber 15 is achieved with a vertical movement apparatus 8 and a horizontal movement apparatus 9, and in the drying chamber 7 there can be selected any drying of hot air blowing drying and pressure reduction drying.
OGAWA KENJI
TSUBOI HIDEFUMI
TOGASHI YOSHIKI
HITACHI CHEMICAL CO LTD