To provide a sublimation/purification apparatus the yield of which when a chemical substance is purified is improved and the operability of which is also improved and to provide a subliming/purifying method.
This sublimation/purification apparatus is provided with: a purification part having a vaporization part for vaporizing the chemical substance and a collection part for collecting the vaporized chemical substance; and an exhausting unit and constituted so that the height Ha of the vaporization part and the height Hb of the collection part satisfy the inequality: Ha>Hb. Alternatively, this sublimation/purification apparatus is provided with: the purification part having the vaporization part for vaporizing the chemical substance and the collection part for collecting the vaporized chemical substance; and the exhausting unit and constituted so that the purification part has a collection inner pipe for collecting the chemical substance and the internal area S1 of the collection inner pipe and the internal area S2 of a collection outer pipe satisfy the inequality: S1≥S2.
| JPS61161137 | TREATMENT OF SUBSTANCE |
KITAZAWA DAISUKE
OKA TETSUO
