Title:
APPARATUS FOR PRODUCING HYDROGEN-DISSOLVED WATER AND METHOD FOR PRODUCING HYDROGEN-DISSOLVED WATER USING THE APPARATUS, AND WASHING DEVICE FOR ELECTRONIC COMPONENT OR FOR INSTRUMENT FOR MANUFACTURING ELECTRONIC COMPONENT
Document Type and Number:
Japanese Patent JP2010017633
Kind Code:
A
Abstract:
To provide a method for producing hydrogen-dissolved water, from which hydrogen peroxide and oxygen have been removed, without degassing.
The method for producing hydrogen-dissolved water includes the catalytic reaction process for removing hydrogen peroxide and oxygen from water to be treated containing hydrogen peroxide and oxygen by using a reaction producing water from hydrogen peroxide and a reaction producing water from oxygen and hydrogen in presence of a platinum group metal catalyst. The method further includes the hydrogenation process for adding hydrogen, consumed in the catalytic reaction process, beforehand to the water to be treated without degassing the water to be treated.
Inventors:
SUGAWARA HIROSHI
YOSHIZAWA MICHIO
YOSHIZAWA MICHIO
Application Number:
JP2008179184A
Publication Date:
January 28, 2010
Filing Date:
July 09, 2008
Export Citation:
Assignee:
ORGANO KK
International Classes:
C02F1/68; B01F1/00; C01B5/00; C02F1/58; H01L21/304
Domestic Patent References:
| JP2003136077A | 2003-05-13 | |||
| JP2003205299A | 2003-07-22 | |||
| JP2006116504A | 2006-05-11 | |||
| JPH10504999A | 1998-05-19 | |||
| JPH03293092A | 1991-12-24 | |||
| JPS5631432A | 1981-03-30 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Tomoo Katsumata
Tadashi Takahashi
Tomoo Katsumata
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