Title:
APPARATUS FOR PRODUCING SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPH0597567
Kind Code:
A
Abstract:
PURPOSE:To prevent occurrence of crystal defect such as twin or lineage by providing a thermocouple in each of stirring jig and crucible inner wall provided above a solid liquid interface in an apparatus producing by a vertical Bridgeman or a vertically and gradually cooling method. CONSTITUTION:A seed crystal 12 and row material melt 28 put thereon are charged into a crucible 11 and a stirring jig 14 is provided in the melt 28 through a protecting tube 15. A pair of thermocouples 17 are provided in the rotation center of jig 14 and one or more thermocouples 18 are provided through a protecting tube 16 between the stirring jig 14 and the inner wall of the crucible 11. A hole which passes through a supporting shaft of jig 14 at opening lid 22 of airtight vessel 13 and the tube 16 and the space between the supporting shaft and the tube 15 is sealed with a liquid sealing agent and these thermocouples 17 and 18 are constituted so as to be able to lift and lower, independently from the jig 14. Thereby temperature distribution in radial direction of the melt at a desired height can be measured and, in the vessel 13, the dissociation of the molt is prevented by output control of the heater 1. Thereby the shape of solid-liquid interface can always be kept in a projected state to the melt, thus the object can be attained.
Inventors:
KAWASE TOMOHIRO
Application Number:
JP25915491A
Publication Date:
April 20, 1993
Filing Date:
October 07, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C30B11/00; C30B29/40; H01L21/208; (IPC1-7): C30B11/00; C30B29/40; H01L21/208
Attorney, Agent or Firm:
Akira Uchida (2 outside)
Next Patent: JPS597568