To provide an apparatus for spraying fine powder which can spray the fine powder such as a spacer for liquid crystal uniformly on a substrate such as a large-size glass substrate.
In the apparatus 10 having a spray nozzle tube 18 which is arranged at a prescribed distance from the substrate, is inclined in a prescribed direction to the substrate, and discharges the powder together with a gas current from the tip, a moving speed control means 92 which controls the moving speed of the tip part of the nozzle tube 18 based on a secondary function which shows the decreasing rate of fine powder spray density based on the distance between a point corresponding to the peak point of test spray density in the substrate and a spray point where the extension line of the nozzle tube crosses the substrates is provided.
BAN MASAKI
WATANABE GORO
