To provide a coating liquid supplying apparatus having excellent supply precision, free from the change of performance of a coating liquid and provided with a valve device having little wear.
In this apparatus, a coating liquid suction port 12a communicating with a coating liquid tank T for storing a coating liquid through a pipe line P1 and a coating liquid feed port 12b communicating with a coater 1 through a pipe line P2 are provided on the same circumference of a head part 12 of a cylinder of a syringe pump 10 constituted of the cylinder 11 and a piston 13 reciprocally moving in the cylinder, a switch rod 22 penetrating through the center of the same circle of the head part is arranged, a valve plate 23 is provided at one end part of the switch rod 22, which is projected into the cylinder, at least one through hole 23a is provided on the circumference corresponding to the same circle of the valve plate and a driving means 20 for reciprocally moving and rotating the switch rod is provided at another end part of the switch rod.
GI SHITAN
JPS58220911A | 1983-12-22 | |||
JPH08304392A | 1996-11-22 |