PURPOSE: To obtain a test apparatus not overlooking the shortcircuit error between circuit pattern layers and enhanced in reliability, by continuously measuring the resistance value between two conductive circuit layers when both electrostatic capacity values measured between a reference conductive plate and two conductive circuit patterns are equal or almost equal to each other.
CONSTITUTION: When both electrostatic capacity measured values C1, C2 between circuit pattern layers 1a, 1b and a reference conductive plate 3 by a capacity measuring apparatus 10 are equal or almost equal, the following operation is taken even a case judged to be a good product by the measurement of electrostatic capacity. That is, a control computer 11 holds a contact element 6 as it is when said contact element 6 is brought into contact with the terminal part 1c of the upper circuit pattern layer 1a theretofore and moves a contact element 5 to the terminal part 1d of the lower circuit pattern layer 1b by an X-Y positioning apparatus 7 to bring the same into contact therewith. Subsequently, a resistance measuring apparatus 9 is operated to measure the resistance between the layers 1a, 1b. When the resistance measured value is 0 or almost 0, it is made clear that the layers 1a, 1b are shortcircuited and the overlooking of a shortcircuit error is prevented.
Namita, Izumi
Next Patent: WIRING SHORTCIRCUIT DETECTOR