To provide an appearance inspection device which is capable of appearance inspection of a large-sized inspection object, is capable of sufficiently detecting even minute appearance defects, and is capable of easily detecting appearance defects of even a transparent inspection object or a black inspection object.
A substantially hemispherical dome unit 3 comprising a pair of dome pieces 31 each of which has a substantially quarter-sphere shape is put over an arrangement position of an inspection object S, and light from a plurality of light sources 41 and 42 uniformly arranged on the outside of the dome unit 3 is scattered or diffused by the respective dome pieces 31 to uniformly illuminate the inspection object S. The pair of dome pieces 31 are arranged so that their end surfaces facing each other are spaced from each other, and the end surfaces extend from tops of the dome pieces 31 to both sides to reach lower ends, and a space 30 is formed from the tops to lower ends on both sides, and a line camera 2 images the inspection object S through the space 30. A direction in which one column of pixels 22 in the line camera 2 extends coincides with a direction of the space 30 linearly extending in plane view.
ETO MITSUO
AMANO MASAKI
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