To solve the problem that, in a conventional application method, uniformity in the surface of a formed liquid film is not enough, especially the difference between the liquid film thickness at the end part of a substrate and the film thickness at the middle part of the substrate is apt to occur to cause the nonuniformity of the film thickness, and the inclusion of bubbles and the breakage of the film are generated dependently on the thickness of the substrate and the material of the film.

In an application method in which, while an application means 2 is moved relatively to a substrate stage 1 for holding the substrate W, and a coating liquid P is supplied from the application means 2 to the substrate W held on the substrate stage 1 to form a coating film on the substrate, the substrate is mounted on the substrate holding part 5 of the substrate stage 1 having the substrate holding part 5 and peripheral parts 1A-1C which can move vertically in relation to the substrate holding part 5, the position of the substrate holding part 5 in relation to the peripheral parts 1A-1C is decided by a change means 5A for changing the height of the substrate, and the liquid film is formed so that an application range covers the peripheral parts.