Title:
APPLICATOR
Document Type and Number:
Japanese Patent JP2002059058
Kind Code:
A
Abstract:
To provide an applicator which can precisely control the thickness of a coating film in the peripheral fringe part area of a substrate and improve the uniformity of the thickness of the coating film.
In the peripheral fringe part areas G1-G4 of the glass substrate G, application is performed by only a first nozzle 51 having one discharge opening, and in an area G5 other than the areas G1-G4, the application is performed by only a second nozzle 52 having a plurality of discharge openings. In this way, the thickness of the coating film in the areas G1-G4 can be controlled easily and precisely so that the uniformity of the thickness of the coating film can be improved.
Inventors:
Tateyama, Kiyohisa
Motoda, Kimio
Motoda, Kimio
Application Number:
JP2000000246743
Publication Date:
February 26, 2002
Filing Date:
August 16, 2000
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G03F7/16; B05B1/14; B05C5/02; B05C11/10; G02F1/13; H01L21/027; (IPC1-7): B05C5/02; B05B1/14; B05C11/10; G02F1/13; G03F7/16; H01L21/027