Title:
CAPACITANCE TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP3107441
Kind Code:
B2
Abstract:
PURPOSE: To avoid dispersion in capacitance when compressing force is zero, to ensure linearity in pressure measurement and to improve pressure measuring accuracy without stray loss by detecting the change in capacitance with a capacitance-type pressure sensor, wherein a ring-shaped or arc-shaped electrode is arranged between the first substrate and the second substrate.
CONSTITUTION: A third electrode 5 keeps an interval (d) between a first electrode 3 and a second electrode 4. The cross section of the electrode 5 is circular. The accuracy of the size is high along the entire length, and the interval (d) is kept in high accuracy and high quality. It is preferable that the size A is close to zero. The electrode 5 concentrates electric lines of force 22 generated between the electrodes 3 and 4 into a part between the edges of the electrodes 3 and 4 so as to prevent the leaking of the electric lines of force to the outside. Since the electrode 5 is provided through a lead wire 12, capacitance Cs for stray loss is eliminated. Therefore, the measuring accuracy is improved based on a capacitance Cx in reference detection. The linearity of pressure and the capacitance Cx is improved. The stray loss caused by the capacitance is inebitably eliminated, and the power consumption in the pressure measuring circuit becomes less.
Inventors:
Noboru Aoki
Toshiya Inoue
Toshiya Inoue
Application Number:
JP3129492A
Publication Date:
November 06, 2000
Filing Date:
January 23, 1992
Export Citation:
Assignee:
Fuji Koki Co., Ltd.
International Classes:
G01L1/14; G01L9/12; (IPC1-7): G01L9/12; G01L1/14
Domestic Patent References:
| JP61155831A | ||||
| JP5555235A | ||||
| JP645138U |
Attorney, Agent or Firm:
Yoshiaki Numagata (2 outside)