Title:
水性エッジビード除去液
Document Type and Number:
Japanese Patent JP2008502935
Kind Code:
A
Abstract:
The present invention relates to an aqueous based edge bead remover.
Inventors:
Demel Ralph Earl.
Meyer Stephen
Speak Mark A.
Meyer Stephen
Speak Mark A.
Application Number:
JP2007516072A
Publication Date:
January 31, 2008
Filing Date:
June 16, 2005
Export Citation:
Assignee:
AZ Electronic Materials USA Corporation
International Classes:
G03F7/42; G03C5/00; G03F7/16; G03F7/20; G03F7/38; H01L21/027
Attorney, Agent or Firm:
Mitsufumi Esaki
Okumura Yoshimichi
Blacksmith
Okumura Yoshimichi
Blacksmith