Title:
水性剥離及び清浄用組成物
Document Type and Number:
Japanese Patent JP4554813
Kind Code:
B2
Abstract:
An aqueous stripping composition comprising a mixture of a polar amine, an organic or inorganic amine and a corrosion inhibitor which is gallic acid, its ester or analog. The stripping composition is effective to strip photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures without redepositing any substantial amount of metal ions.
Inventors:
Ward, Earl
Michelotti, Frank W
Michelotti, Frank W
Application Number:
JP2000516788A
Publication Date:
September 29, 2010
Filing Date:
October 13, 1998
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
B08B3/08; C09D9/00; C11D3/20; C11D3/30; C11D3/34; C11D3/43; C11D7/26; C11D7/32; C11D7/50; C11D11/00; C23G5/036; G03F7/42
Domestic Patent References:
| JP7120937A | ||||
| JP7219241A | ||||
| JP545894A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Atsushi Ebiya
Masatoshi Takahashi
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Atsushi Ebiya
Masatoshi Takahashi