Title:
シリカガラス膜の除去用水溶液及びこの水溶液を用いたシリカガラス膜の除去方法
Document Type and Number:
Japanese Patent JP3556661
Kind Code:
B1
Inventors:
Makoto Fujiwara
Application Number:
JP2003281090A
Publication Date:
August 18, 2004
Filing Date:
July 28, 2003
Export Citation:
Assignee:
Bto Co., Ltd.
International Classes:
C03C15/00; C09D9/00; C09K13/02; (IPC1-7): C03C15/00; C09D9/00; C09K13/02
Domestic Patent References:
| JP1217403A | ||||
| JP1126245A | ||||
| JP62117668A | ||||
| JP2000192036A |
Attorney, Agent or Firm:
Kiyoji Sawa