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Title:
AQUEOUS STRIPPING AND CLEANING COMPOSITION
Document Type and Number:
Japanese Patent JP2009256680
Kind Code:
A
Abstract:

To provide an aqueous stripping composition which shows no human or environmental toxicity, is miscible with water and biodegradable.

The aqueous stripping composition comprises a mixture of a polar amine, an organic or inorganic amine and a corrosion inhibitor which is gallic acid, its ester or analog. The stripping composition is effective to strip photoresists, residues generated from plasma process such as organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresists at low temperatures without redepositing any substantial amount of metal ions.


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JPH1129760ULTRAVIOLET PROTECTING AGENT
Inventors:
WARD IRL E
MICHELOTTI FRANK W
Application Number:
JP2009149844A
Publication Date:
November 05, 2009
Filing Date:
June 24, 2009
Export Citation:
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Assignee:
AIR PROD & CHEM
International Classes:
C09K3/00; B08B3/08; C09D9/00; C11D3/20; C11D3/30; C11D3/34; C11D3/43; C11D7/26; C11D7/32; C11D7/34; C11D7/50; C11D11/00; C23G5/036; G03F7/42; H01L21/304
Domestic Patent References:
JPH07219241A1995-08-18
JPH07325404A1995-12-12
JPH07120937A1995-05-12
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Atsushi Ebiya
Masatoshi Takahashi



 
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