プラズマ処理システムのアーク検出装置

Title:

プラズマ処理システムのアーク検出装置

Document Type and Number:

Japanese Patent JP4837369

Kind Code:

B2

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Inventors:

Ryohei Tanaka

Application Number:

JP2005345651A

Publication Date:

December 14, 2011

Filing Date:

November 30, 2005

Export Citation:

Assignee:

Daihen Co., Ltd.

International Classes:

H05H1/00; H01L21/3065; H05H1/46

Domestic Patent References:

Foreign References:

WO2005057993A1
WO2005015964A1

Attorney, Agent or Firm:

Minoru Yoshida
Tatsuya Tanaka
Tsukasa Senba
Hiroshi Furusawa

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