Title:
ARC DISCHARGE IDENTIFICATION METHOD, ARC DISCHARGE IDENTIFICATION DEVICE AND PLASMA POWER-FEEDING UNIT
Document Type and Number:
Japanese Patent JP2008166263
Kind Code:
A
Abstract:
To provide an identification method of arc discharge in which a requirement for a high treatment quality without lowering a treatment ratio excessively, an arc discharge identification device and a plasma power-feeding unit.
In the arc discharge identification method in a plasma process, a characteristic volume KG of a plasma process for identification of arc discharge generated in plasma is monitored, and after a standby for a first time duration t1 after identification of the arc discharge, the characteristic volume KG is inspected again. When the arc discharge is not identified after a lapse of the first time duration t1, a first countermeasure for controlling the arc discharge is carried out.
Inventors:
ZAHRINGER GERHARD
Application Number:
JP2007305904A
Publication Date:
July 17, 2008
Filing Date:
November 27, 2007
Export Citation:
Assignee:
HUETTINGER ELEKTRONIK GMBH
International Classes:
H05H1/00; C23C14/34; H05H1/24
Domestic Patent References:
| JP2002294445A | 2002-10-09 | |||
| JPH1088338A | 1998-04-07 | |||
| JP2002235170A | 2002-08-23 | |||
| JP2005526184A | 2005-09-02 | |||
| JP2002294445A | 2002-10-09 | |||
| JPH1088338A | 1998-04-07 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel