Title:
ARC EVAPORATING SOURCE, VACUUM DEPOSITION DEVICE AND VACUUM DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP3917348
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To hold the temp. region to the one in which magnetic force is not deteriorated even in the case a permanent magnet is exposed to a high temp. atmosphere in the case the permanent magnet is provided for controlling the behavior of an arc spot, by which the controllability of the behavior of the arc spot is maintained and to reduce the flying route of electrons from a cathode.
SOLUTION: An evaporating material 3 to form into the cathode of arc discharge, a permanent magnet 7 arranged so as to surround the evaporating material 3 and controlling the behavior of an arc spot by magnetic force and a cooling part cooling the permanent magnet 7 are provided. The cooling part has a cooling chamber 30 to be fed with a cooling medium at the inside, and the cooling chamber 30 is insulated from the cathode 3 and is formed into the anode of arc discharge.
Inventors:
Kazuki Takahara
Hirofumi Fujii
Hirofumi Fujii
Application Number:
JP2000157094A
Publication Date:
May 23, 2007
Filing Date:
May 26, 2000
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/24; (IPC1-7): C23C14/24
Domestic Patent References:
| JP11036063A | ||||
| JP4221064A | ||||
| JP3072068A | ||||
| JP7316794A | ||||
| JP62037376A | ||||
| JP3500469A | ||||
| JP8148107A |
Attorney, Agent or Firm:
Toshio Yasuda
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