Title:
Arc vapor deposition Me11-aMe2 aZI/Mo1-b-cSicBbZII multilayer covering
Document Type and Number:
Japanese Patent JP6257837
Kind Code:
B2
Abstract:
A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me11-aMe2aZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. Also described is a method for depositing the above mentioned coating.
Inventors:
Riedle, Helmut
Arnz, Miriam
Poltsik, Peter
Milehofer, Paul Heinz
Arnz, Miriam
Poltsik, Peter
Milehofer, Paul Heinz
Application Number:
JP2017503896A
Publication Date:
January 10, 2018
Filing Date:
July 24, 2015
Export Citation:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON
International Classes:
C23C14/06; B23B27/14
Domestic Patent References:
| JP2006137982A |
Foreign References:
| WO2014037072A1 |
Attorney, Agent or Firm:
Fukami patent office
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