Title:
半導体洗浄用のアルキメデスブラシ
Document Type and Number:
Japanese Patent JP6673916
Kind Code:
B2
Abstract:
A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel.
Inventors:
Bradley Scott Wizards
Eric Scott Nelson
Robert Allen Willis
Eric Scott Nelson
Robert Allen Willis
Application Number:
JP2017525089A
Publication Date:
March 25, 2020
Filing Date:
October 16, 2015
Export Citation:
Assignee:
Illinois Tours Works Inc.
International Classes:
H01L21/304; A46B11/06; A46D1/00
Domestic Patent References:
| JP2007330536A | ||||
| JP2000015190A | ||||
| JP2013520803A | ||||
| JP60186085U |
Foreign References:
| CN203018351U | ||||
| KR1020040081973A |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito
Tetsuro Shimada
Shinji Mitsuhashi
Yasushi Ohashi
Koichi Ito