PURPOSE: To enable a high performance sputtering process for a material not suitable to produce an integrated target, etc., by arranging at least one of heat contact layers between a target, which consists of a single or several rings mounted to a carrier tube for particularly changable, and a carrier tube.
CONSTITUTION: A heat contact layer 38 made of metal, which is arranged between a carrier tube 36 and rings 37, 37', 37' consisting of a target material, enables heat transfer from the target material heated with gas discharge to the carrier tube 36, further from thereon, an optimum heat transfer to a cooling material leaking out between the carrier tube 36 and a permanent magnet 6 system. By this method, the target material is sufficiently cooled and is not melted at a corresponding high output intensity. Thus, a relatively thick target material can be used and a durability time of this arrangement is extended.
| JPH10147859 | FORMATION OF SUPERCONDUCTIVE LAYER |
| WO/2019/082035 | A METHOD FOR THE MANUFACTURE OF A COATED STEEL SHEET |
KOROSHIETSUTSU FURANTSU
BUAGENDORISHIYUTERU ARUFURETSU
BANGERUTO HERUBUITSUHI
| JPS59197570A | 1984-11-09 | |||
| JPS5266837A | 1977-06-02 | |||
| JPS5923870A | 1984-02-07 | |||
| JP58087867B | ||||
| JPS5597472A | 1980-07-24 | |||
| JPS5920470A | 1984-02-02 | |||
| JPS59116375A | 1984-07-05 | |||
| JPS6176673A | 1986-04-19 |