To make the offset values calculated from the results of measurements found from measurement marks arranged at the four corners of an exposure shot coincident with true values even when the results of measurements are offset from the true values.

The register measurement marks arranged at the adjacent two corners of an exposure shot are arranged at such positions that the line connecting the two positions become perpendicular to the line connecting the two corners, and the positions become axially symmetric with respect to axes of symmetry passing the center 10 of the exposure shot. On the other hand, the measurement marks arranged at the diagonal corners of the exposure shot are arranged at such positions that become point symmetric with respect to the center 10.