Title:
ARRAY TYPE ELECTROMAGNETIC WAVE SENSOR
Document Type and Number:
Japanese Patent JPH05118914
Kind Code:
A
Abstract:
PURPOSE:To provide an array type electromagnetic sensor capable of obtaining two dimensional information of electromagnetic wave with high accuracy without using a semiconductor, and providing less scattering in characteristics of respective sensors and hardness in deterioration in a long time of use. CONSTITUTION:A plurality of holes 3 are formed on an insulation layer 2 in the two dimensional form. In each hole 3 apart of an anode is positioned. On and below the insulation layer 2 a photoelectric cathode 4 is arranged, or between the anode and cathode a diode is disposed, and photoelectric current is taken out of the anode in correspondence with the incident amount of electromagnetic wave in each hole position.
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Inventors:
HORI NAOYUKI
Application Number:
JP28280491A
Publication Date:
May 14, 1993
Filing Date:
October 29, 1991
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01J1/02; G01T1/28; H01J1/32; H01J1/34; H01J43/02; (IPC1-7): G01J1/02; G01T1/28; H01J1/32; H01J1/34; H01J43/02
Attorney, Agent or Firm:
Nishida Arata
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