Title:
ARRAY OF ULTRASONIC TRANSDUCERS
Document Type and Number:
Japanese Patent JP2002271897
Kind Code:
A
Abstract:
To provide an enhanced ultrasonic transducer comprising a piezoelectric layer having a high piezoelectric coupling coefficient k.
This invention relates to an array of ultrasonic transducers each comprising a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasonic transducer and to a method of manufacturing an array of ultrasonic transducers.
Inventors:
KLEE MAREIKE KATHARINE
SCHLENKER TILMAN ULRICH
DANNAPPEL OLAF
LOEBL HANS-PETER
SCHMITZ GEORG DR
FRASER JOHN DOUGLAS
SCHLENKER TILMAN ULRICH
DANNAPPEL OLAF
LOEBL HANS-PETER
SCHMITZ GEORG DR
FRASER JOHN DOUGLAS
Application Number:
JP2002014694A
Publication Date:
September 20, 2002
Filing Date:
January 23, 2002
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV
International Classes:
H04R17/00; B06B1/06; H01L41/08; H01L41/09; H01L41/187; H01L41/22; H02N2/00; (IPC1-7): H04R17/00; H01L41/08; H01L41/09; H01L41/187
Attorney, Agent or Firm:
Tadahiko Ito
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