Title:
砒素除去装置および半導体の製造装置
Document Type and Number:
Japanese Patent JP7151608
Kind Code:
B2
Abstract:
To provide an arsenic removal device capable of alleviating the concern that piping may be clogged.SOLUTION: An arsenic removal device 21a removes arsenic from exhaust gas containing arsenic, exhausted from a deposition apparatus 13 for depositing a semiconductor film. The arsenic removal device 21a includes a case 24a with a first space 27a and a first wall surface 30a exposed to the first space 27a and further includes a cooling part 25a for holding refrigerant; first piping 22a regulating a first flow channel 19a for exhaust gas, connected with the case 24a and having a discharge port 20a for flowing exhaust gas into the first space 27a; filters 26a-26d arranged vertically downward of the first wall surface 30a in such a state that the arsenic removal device 21a is installed; and second piping 23a regulating a second flow channel 39a for exhaust gas, connected with the case 24a and having an exhaust port 40a for discharging exhaust gas having passed through the filters 26a-26d from the first space 27a. The discharge port 20a opposes to the first wall surface 30a.SELECTED DRAWING: Figure 1
Inventors:
Yoshimoto Susumu
Kei Fujii
Koji Nishizuka
Otsuka Jun
Kei Fujii
Koji Nishizuka
Otsuka Jun
Application Number:
JP2019080632A
Publication Date:
October 12, 2022
Filing Date:
April 22, 2019
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/205; C23C16/44
Domestic Patent References:
| JP2002118065A | ||||
| JP2016511328A | ||||
| JP2009272526A | ||||
| JP3205818A | ||||
| JP2019055385A | ||||
| JP2019217489A | ||||
| JP2003163169A | ||||
| JP10158845A |
Attorney, Agent or Firm:
Shuhei Kitano
Katsuya Tanaka
Katsuya Tanaka
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