Title:
ARTICLE ADSORBING MECHANISM
Document Type and Number:
Japanese Patent JPS5245873
Kind Code:
A
Abstract:
PURPOSE:An article adsorbing mechanism which is capable of prespectively simultaneously and positively adosrbing a multiplicity of articles adhered to tapes.
Inventors:
ITOU OSAMU
ARAI FUMIO
ARAI FUMIO
Application Number:
JP12070875A
Publication Date:
April 11, 1977
Filing Date:
October 08, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/67; H01L21/68; H05K13/02; (IPC1-7): H01L21/68