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Title:
ARTICLE DELIVERING DEVICE
Document Type and Number:
Japanese Patent JPS63134442
Kind Code:
A
Abstract:

PURPOSE: To securely take out articles by holding a carrier cassette inclined a predetermined angle on a holder section of device body while pushing up one of the articles located on the tail end of disposal direction with a lift mechanism.

CONSTITUTION: A main body 1 consists of a bottom plate 2 and a bed plate 3 inclined a predetermined angle θ relative thereto. The bed plate 3 is provided on the upper surface with a plurality of holder sections 4 which comprise respectively first guide plates 5 provided on the upper end of bed plate 3 and second guide plates 6 provided on the lower end. An arcuate pushing spring 7a is mounted on the inner surface of first guide plate 5. A wafer 12 in a cassette 7 held by the holder section 4 is pushed up to a position slightly higher than the upper end surface of cassette 7 by a lift mechanism 15 as it is inclined a predetermined angle and then held by an arm 37 of a robot 35 so that the upper-most wafer is taken out.


Inventors:
FURUYA MASAAKI
Application Number:
JP27732286A
Publication Date:
June 07, 1988
Filing Date:
November 20, 1986
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B65H1/28; B65H3/24; H01L21/673; H01L21/677; H01L21/68; (IPC1-7): B65H1/28; B65H3/24; H01L21/68
Attorney, Agent or Firm:
Takehiko Suzue



 
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