Title:
ARTICLE TRANSFER DEVICE OF HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3113821
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent a temperature fluctuation of a heat treatment device and lowering of the degree of cleanliness of a room by simplifying a mechanism, an operation and a control of a work transfer device.
SOLUTION: In a work transfer device, works are stacked in a plurality of layers in sections A and B respectively. The sections A and B are respectively provided with four rotating and elevating shafts 4a respectively, wherein each section A is provided with a work receiving portion 1a. The sections A and B are also provided with horizontal transfer shafts 4 respectively and each shaft 4 is provided with a work receiving portion 4a which can be commonly used by the sections A and B. The horizontal transfer shafts 4 are supported on a base frame 51. A feeding slider 6 and a delivery slider 7 are also mounted on the base frame 51. With such work receiving portions 1a, 4a, the feeding slider 6 and the delivery slider 7, all the necessary procedures including feeding and delivery of works, changing of work supports and elevation of works, transfer of work from the uppermost layer of the section A to the uppermost layer of the section B can be carried out. Such a work transfer device can decrease its structural members, can simplify its mechanism and its control, and can speedily and reliably transfer the works. Since the shafts 4 move in a heat treatment chamber 7, the degree of cleanliness of the heat treatment chamber 7 is maintained.
Inventors:
Tsutomu Hirata
Application Number:
JP24557096A
Publication Date:
December 04, 2000
Filing Date:
August 27, 1996
Export Citation:
Assignee:
Tabai Espec Co., Ltd.
International Classes:
B65G25/00; F27B9/14; F27D3/12; H01L21/677; H01L21/68; (IPC1-7): F27B9/14; B65G25/00; F27D3/12; H01L21/68
Domestic Patent References:
| JP7198262A |
Attorney, Agent or Firm:
Kenji Kageyama