ARTICLE WITH PROTECTIVE COATING

Title:

ARTICLE WITH PROTECTIVE COATING

Document Type and Number:

Japanese Patent JP2023183399

Kind Code:

A

Abstract:

To provide an article with a protective coating.SOLUTION: Various embodiments of the present technology may provide an article formed from a ceramic material. The article may further include a protective coating overlying one or more surfaces of the article. The protective coating may include a first layer including aluminum and magnesium, and a second layer including alumina, or alumina and magnesium oxide.SELECTED DRAWING: Figure 1

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Inventors:

JOAQUIN AGUILAR SANTILLAN
GAO HONG
SHANKER KUTTATH

Application Number:

JP2023096373A

Publication Date:

December 27, 2023

Filing Date:

June 12, 2023

Export Citation:

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Assignee:

ASM IP HOLDING BV

International Classes:

H01L21/683; C04B35/581; C04B41/87; C23C14/06; C23C14/50; C23C16/458

Attorney, Agent or Firm:

Yasuhiko Murayama
Shinya Mihiro
Tatsuhiko Abe

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