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Patent Searching and Data


Title:
ARTICULATED ARM DEVICE, STAGE DEVICE AND EXPOSURE APPARATUS
Document Type and Number:
Japanese Patent JP2011108983
Kind Code:
A
Abstract:

To suppress reduction in productivity and adverse influences on exposure processing, and the like.

An articulated arm device has a joint JT12, to which a pair of connection members AM11 and AM12 are rotatably connected on a prescribed axis. The joint has a bearing device BR12, that allows the pair of connection member to relatively rotate on the prescribed axis, as well as, restricts relative movement in a direction orthogonal to the prescribed axis in a noncontact way.


Inventors:
Ono, Kazuya
Application Number:
JP2009000264795
Publication Date:
June 02, 2011
Filing Date:
November 20, 2009
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; F16C32/04; G03F7/20; H01L21/677; B25J17/00