Title:
ARTICULATED MANIPULATOR
Document Type and Number:
Japanese Patent JP3181778
Kind Code:
B2
Abstract:
PURPOSE: To carry out a stable and a high response of position control, by arranging a driving member by a shape memory element to each joint, and providing the first thermoelectric conversion control means to drive the shape memory element, and the second thermoelectric conversion control means to give a preheating to the shape memory element.
CONSTITUTION: In a CMOS integrated circuit formed on each joint of a articulated manipulator, a P type high density buried layer 32 is formed on a P type semiconductor substrate 31, and an N type low density epitaxial layer 30 is formed on the surface of the substrate 31. And to the upper side of the P type high density buried layer 32, an N well is formed in the area to form a PchMOSFET, and a P well is formed in the area to form a NchMOSFET, and a specific area is covered by a flexible insulating material. And, an interjoint wiring 55 by an Al membrane to connect the electron circuit areas each other, and a thermoelectric wire pattern 56 for driving and a thermoelectric wire pattern 57 for preheating by a Ti membrane, are formed, and a shape memory alloy membranous pattern is formed at the upper layer through an interlayer insulating membrane.
Inventors:
Yasuo Hirata
Shinji Kaneko
Shinji Kaneko
Application Number:
JP30820893A
Publication Date:
July 03, 2001
Filing Date:
December 08, 1993
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G02B23/24; A61B1/00; B25J9/06; B25J13/00; B25J19/00; B81B3/00; B81B7/00; B81C1/00; F03G7/06; (IPC1-7): B25J19/00; F03G7/06
Domestic Patent References:
| JP2261078A | ||||
| JP6146475A | ||||
| JP6037629A | ||||
| JP354378A | ||||
| JP63179083U |
Attorney, Agent or Firm:
Takehiko Suzue