To form an etching thin plate layer and facilitate an integral assembling of a module having fluid-element, electrical, and mechanical components by executing a material removal treatment to each thin plate member and mutually attaching a set of thin plate members in such a state as forming a modular subsystem.
A set of components including a set of multi-separating valves 14a, 14b connected to a plurality of parallel-connecting flow control valves 161-16N are provided between an inlet filter 12 and an outlet filer 13 of a fluid module 10. The respective flow control valves 161-16N are connected in series with respective corresponding flow registers 181-18N. A lot of layers constituting the flow control module 10 by sandwiched between a top external member and a bottom external member etches a thin plate of a starting material protected by a photosensitive anti-corrosion film by using photochemical pulverizing treatment. These lots of layers can be mutually attached using a sealing layer between a lot of layers and a fastening tool by mechanical binding using diffusion bonding, electronic beam welding, and adhesive.
CARDIN JOSEPH M
GONZALEZ ANTONIO E
DYER KEITH
| JPH07508085A | 1995-09-07 |
| WO1997047013A1 | 1997-12-11 |