Title:
ASSEMBLING METHOD OF QUADRUPOLE SECTION OF PARTIAL PRESSURE VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2003004572
Kind Code:
A
Abstract:
To accurately and easily assemble a quadrupole section of a partial pressure vacuum gauge using a jig.
The partial pressure vacuum gauge with a quadrupole section employs an assembling jig and an assembling method by which electrode rods are fixed and spaced with the accuracy identical to that of the jig without being affected by the dimensional accuracy of an insulating support member when the quadrupole section is assembled.
Inventors:
HORIKAWA YUICHI
Application Number:
JP2001234191A
Publication Date:
January 08, 2003
Filing Date:
June 18, 2001
Export Citation:
Assignee:
HORIZON KK
International Classes:
H01J9/14; G01L21/30; H01J41/10; H01J49/42; (IPC1-7): G01L21/30; H01J9/14; H01J41/10