Title:
ASTIGMATISM CORRECTING METHOD OF ELECTRON BEAM DEVICE
Document Type and Number:
Japanese Patent JP3112541
Kind Code:
B2
Abstract:
PURPOSE: To realize the astigmatism correcting method of an electron beam device, which can correct the astigmatism in the X, Y directions accurately in a short time.
CONSTITUTION: When the dislocation quantity D of astigmatism is detected by a peak detecting circuit 25, a CPU 26 reads out the plural astigmatism correction quantity corresponding to the astigmatism dislocation quantities D from a data memory 27, and sets the in registers 10, 14 in order. Each time that the combination of each astigmatism correction quantity is supplied to coils 7, 8, the scanning signal for scanning the sample 4 two-dimensionally is supplied to a deflecting coil 5. The secondary electron generated by this scanning is detected by a detector 19, and the detecting signal thereof is integrated by an integrator 22. The optimal astigmatism correction quantity is the astigmatism correction quantity of the X, Y directions at the time when an integral signal intensity curve corresponding to each combination of the astigmatism correction quantity in the X, Y direction is positioned at a peak.
Inventors:
Atsushi Yamada
Application Number:
JP3197992A
Publication Date:
November 27, 2000
Filing Date:
February 19, 1992
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/153; H01J37/28; (IPC1-7): H01J37/153; H01J37/28
Attorney, Agent or Firm:
Fujishima Ijima (1 outside)