Title:
ATMOSPHERE OPENING METHOD OF VACUUM CHAMBER AND ITS DEVICE
Document Type and Number:
Japanese Patent JP3137806
Kind Code:
B2
Abstract:
PURPOSE: To provide an atmosphere opening method of a vacuum chamber, capable of simplifying a structure without flinging up particles and its device.
CONSTITUTION: In an atmosphere opening device for opening a vacuum chamber arranged in the clean atmosphere to the atmosphere, a vacuum chamber 2 is connected with a main gas supply system 38 and further connected with an opening communicating path 46 provided midway with an auxiliary switch 50, and also this gas inlet 48 is arranged in the clean atmosphere. First. gas is introduced into the vacuum chamber via the main gas supply system by a controlling part 52, and if a manometer 28 indicates a specific value, the gas is continued to supply during the period when it is expected to be in such condition that pressure of the vacuum chamber is slightly lower than that of the clean atmosphere. When the period has passed, the gas is stopped supplying by the main gas supply system, the instant that the auxiliary switch is opened, whereby clean gas by a difference in pressure is introduced via the opening communicating path to open to the atmosphere.
Inventors:
Akira Kagazume
Application Number:
JP14003093A
Publication Date:
February 26, 2001
Filing Date:
May 19, 1993
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F16K24/04; H01L21/02; (IPC1-7): H01L21/02; F16K24/04
Domestic Patent References:
| JP3283612A |
Attorney, Agent or Firm:
Akihiro Asai (1 person outside)