Title:
ATMOSPHERIC PRESSURE IONIZED MASS ANALYSIS DEVICE
Document Type and Number:
Japanese Patent JP3467528
Kind Code:
B2
Abstract:
PURPOSE: To suppress the degassing from each part, improve detecting sensitiv ity, and downsize a device by integrating the part extending from an ion source part to a mass spectrometric part through a differential exhausting part by the fastening structure of a screw extending through them.
CONSTITUTION: This device has a structure in which an ion source part 1, a differential exhaust part 2, and a mass analysis part 3 are integrated together by the screwing of a long screw 17. A sample gas 5 is introduced from a feed pipe 6, the contained ultramicro impurity is formed into an ionized impurity 21 by a needle electrode 4 mounted on the end surface center part of the ion source part 1 in the through state, and the resulting sample gas is carried to the detecting part of a quadrupole mass analysis meter 50 through the small hole 31 of an orifice plate 30, the small hole 45 of a throttle plate 30, and the hole 46 of an electrostatic lens 41, and analyzed there. Because of the structure having no exposure of the screw to the gas passing space, the gas containing the impurity is never released from the screw surface, generation of noise can be prevented to improve the analyzing sensitivity, and the sample gas passing space can be also narrowed to downsize the device.
Inventors:
Keiji Hasumi
Kunio Hoshino
Joji Koike
Kunio Hoshino
Joji Koike
Application Number:
JP24046294A
Publication Date:
November 17, 2003
Filing Date:
October 05, 1994
Export Citation:
Assignee:
Renesas Electronics East Japan Semiconductor Co., Ltd.
International Classes:
G01N27/62; H01J49/10; (IPC1-7): H01J49/10; G01N27/62
Domestic Patent References:
| JP42033A | ||||
| JP6232238A | ||||
| JP58128635A |
Attorney, Agent or Firm:
Shuuki Akita