ATMOSPHERIC TEMPERATURE RAISING GAS DESORBING DEVICE

Japanese Patent JP3243079

B2

PURPOSE: To provide an atmospheric temperature raising gas desorbing device capable of quantitatively analyzing an impurity adsorbed and stored on the surface of a solid sample (semiconductor wafer, optical disc, or the like).
CONSTITUTION: An atmospheric temperature raising gas desorbing device for raising the temperature of a flat solid sample 18 in a chamber 6 and desorbing an impurity adsorbed and stored on the surface of the solid sample into a carrier gas 19 under atmospheric pressure is provided with a desorbing chamber 7A arranged in the chamber 6 to which a first gas supplying system 1 for supplying the carrier gas 19 is connected to desorb the impurity adsorbed and stored on the surface of the solid sample 19; a carrying support chamber 7B arranged in the chamber 6 and separated from the desorbing chamber 7A by a partitioning member 6A and the solid sample 18 closely adhered to the partitioning member 6A; a heater 8 for heating the solid sample 18 closely adhered to the partitioning member 6A; and a reserve chamber 9 connected to the carrying support chamber-7B to which a second gas supplying system 13 for supplying a purge gas 20 is connected.

WO/2003/029792	SORTING GRAIN DURING HARVESTING
WO/1981/000766	APPARATUS AND METHOD FOR SAMPLING FLOWING FLUIDS AND SLURRIES

Kazuo Nakano
Kazuaki Mizokami
Keiji Hasumi
Katsuhiko Ito
Michimasa Funahashi
Yasuhiro Mitsui
Takashi Irie
Takeshi Tajima
Sadao Matsuoka

JP22989493A

January 07, 2002

September 16, 1993

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株式会社日立製作所
日立東京エレクトロニクス株式会社

G01N1/02; G01N1/00; G01N1/28; G01N30/00; H01L21/324; H01L21/66; G01N1/22; (IPC1-7): G01N1/02; G01N1/28; H01L21/324; H01L21/66

JP4324338A
JP5118966A
JP2254335A
JP6213793A
JP6288881A
JP62198730A
JP60230059A

Shuuki Akita

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