Title:
原子間力顕微鏡
Document Type and Number:
Japanese Patent JP4810251
Kind Code:
B2
Abstract:
A surface shape of a member to be measured is measured by reflecting measuring light at a reflection surface of a probe and utilizing an atomic force exerting between the probe and utilizing an atomic force exerting between the probe and the member to be measured. In addition to a first scanner for driving the probe, a second scanner for moving a focus position of an optical system is provided. Position conversion data representing a correlation between amounts of control of the first scanner and the second scanner are obtained in advance. By synchronously driving the first scanner and the second scanner, the focus position of the optical system is caused to follow the probe to improve measurement accuracy.
Inventors:
Masato Negishi
Application Number:
JP2006038779A
Publication Date:
November 09, 2011
Filing Date:
February 16, 2006
Export Citation:
Assignee:
Canon Inc
International Classes:
G01Q20/02; G01Q60/24; G01B21/30; G01Q70/06
Domestic Patent References:
| JP2002188987A | ||||
| JP5040969A | ||||
| JP2001304833A | ||||
| JP2003215017A |
Attorney, Agent or Firm:
Kazuo Chikajima
Yoshiro Sakamoto
Yoshiro Sakamoto