PURPOSE: To ensure the high accuracy of motion over a stroke of a long distance, i.e., several tens of centimeters in regard of an attitude control table itself.
CONSTITUTION: An arithmetic unit 13 calculates a 5-axis motion error by combining the 3-axis measurement results of the 3-axis measurement controllers 11 and 12 based on the measurement results of two 3-axis masurement units 8 and 9. Then the unit 13 applies the operational output to a 5-axis attitude control table 15 set on a slide table 3 for the 5-axis attitude control so that the 5-axis motion error is eliminated. Furthermore the 5-axis motion error caused by the motion of the table 3 is corrected so that the attitude of the table 15 is kept with high accuracy while the table 15 itself is moved in a long distance, i.e., several tens of centimeters. Furthermore the 5-axis error can also be precisely corrected in a submicron range for a long stroke except the traveling direction of a linear motion object.
FUJITA TSUTOMU
ENDO HIDEKI
