Title:
ATTITUDE-ERROR MEASURING APPARATUS FOR DIRECT MOVING MECHANISM
Document Type and Number:
Japanese Patent JPH04130209
Kind Code:
A
Abstract:
PURPOSE:To make it possible to use a laser beam as a highly reliable straight- line reference by providing beam protecting bellows and an optical assembly which independently measures the error in straightness and the change in attitude angle of a moving body based on the deviation of the optical point of the laser beam. CONSTITUTION:A laser beam 2 emitted from a laser 1 reaches respective corresponding optical-point-deviation detecting elements 8 - 11 and an optical-point- deviation detecting element 7 through beam splitters 3 - 6. Thus, the deviation of the optical point is detected. A moving body 12 is moved with the beam 2 as a straight-line reference. Thus, bellows 18 and 20 are expanded and contracted, accordingly. At this time, the optical path of the beam 2 is covered with the bellows 18 and 20. The insides of the bellows are set in a vacuum state or at a low pressure. Therefore, the beam 2 is in the stable state without the influence of the flow of atmosphere. Thus, the attitude error of the moving body 12 can be measured highly accurately with an optical assembly.
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Inventors:
TAKITANI TOSHIO
FUJITA TSUTOMU
TAKAMATSU SHIGEO
FUJITA TSUTOMU
TAKAMATSU SHIGEO
Application Number:
JP25274190A
Publication Date:
May 01, 1992
Filing Date:
September 21, 1990
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO
International Classes:
G01C15/00; G01B11/26; G01B11/30; (IPC1-7): G01B11/26; G01B11/30; G01C15/00
Attorney, Agent or Firm:
Yoshihiro Morimoto