Title:
AUGER ELECTRONIC SPECTROSCOPE AND COATING DEVICE FOR THE SAME
Document Type and Number:
Japanese Patent JP2001033409
Kind Code:
A
Abstract:
To provide a coating device for an Auger analyzing device capable of accurately analyzing the metal coating of a sample of a film thickness of 45 or less.
This coating device is provided with a sample base 1 on which samples are placed, a target 3 constituted of a conductive material, shutters 2 provided between samples placed on the sample base 1 and the target 3 according to the samples, and an opening/closing control means to control the opening and closing of the shutters 2. At least, three samples are placed on the sample base 1, and the opening/closing control means independently controls the opening and closing of the shutters 2 each provided according to samples.
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Inventors:
YAMAMURO SATORU
Application Number:
JP20444099A
Publication Date:
February 09, 2001
Filing Date:
July 19, 1999
Export Citation:
Assignee:
RICOH KK
International Classes:
G01N23/227; G01N1/28; (IPC1-7): G01N23/227; G01N1/28