Title:
角度可変照明を伴う自動焦点
Document Type and Number:
Japanese Patent JP6728431
Kind Code:
B2
Abstract:
Various aspects of the invention relate to techniques to facilitate autofocus techniques for a test object by means of an angle-variable illumination. Here, image datasets are captured at a multiplicity of angle-variable illumination geometries. The captured image datsets are evaluated in order to determine the Z-position.
Inventors:
Stoppe, Lars
Auto, thomas
Dietrich, Christian
Sticker, marx
Auto, thomas
Dietrich, Christian
Sticker, marx
Application Number:
JP2019050335A
Publication Date:
July 22, 2020
Filing Date:
March 18, 2019
Export Citation:
Assignee:
CARL ZEISS MICROSCOPY GMBH
International Classes:
G02B7/28; G02B7/32; G02B21/00; G03B13/36; H04N5/225; H04N5/232
Domestic Patent References:
| JP2004163499A | ||||
| JP2003057552A |
Foreign References:
| WO2017081539A1 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation