Title:
AUTOMATED GUIDED VEHICLE
Document Type and Number:
Japanese Patent JP2003237941
Kind Code:
A
Abstract:
To provide an automated guided vehicle that prevents damage to a wafer from a mapping sensor when wafers contained in a buffer cassette are mapped, in an automated guided vehicle mounted with a sheet transfer device and a buffer cassette.
The automated guided vehicle 1 is equipped with the mapping sensor 24 vertically movable without contact with wafers 7 contained in the buffer cassette 5 as the contained wafers are pressed by a pressing member 25 across an opening 5a of the buffer cassette so as not to protrude from the opening 5a. The pressing member 25 serves also as a protrusion preventing means for the wafers during travel.
Inventors:
Akiyama, Shuji
Nakao, Takashi
Nakao, Takashi
Application Number:
JP2002000038343
Publication Date:
August 27, 2003
Filing Date:
February 15, 2002
Export Citation:
Assignee:
TOKYO ELECTRON LTD
MURATA MACH LTD
MURATA MACH LTD
International Classes:
B61D27/00; B65G49/07; H01L21/677; H01L21/68; B61D27/00; B65G49/07; H01L21/67; (IPC1-7): B65G49/07; B61D27/00; H01L21/68
