Title:
AUTOMATED HIGH SPEED OPTICAL INSPECTOR
Document Type and Number:
Japanese Patent JP2002174514
Kind Code:
A
Abstract:
To provide an apparatus for inspecting surface characteristics of a substrate, using TDI sensor means.
The apparatus for inspecting surface characteristics of a substrate comprises a means for approximately uniformly illuminating a first and second patterns in a region for inspecting at least one substrate surface at the same time, a pair of TDI sensor means for taking images of the first and second patterns one after the other, a means 319 for comparing the image-taken first and second patterns, based on the pair of TDI sensor means, and a means 320 for storing the positions of the first and second patterns and the comparison result.
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Inventors:
CHADWICK CURT H
SHOLES ROBERT R
GREENE JOHN D
TUCKER III FRANCIS D
FEIN MICHAEL E
JANN P C
HARVEY DAVID J
BELL WILLIAM
TSAI BIN-MING BENJAMIN
NOVAK WALTER THOMAS
WIHL MARK J
SHOLES ROBERT R
GREENE JOHN D
TUCKER III FRANCIS D
FEIN MICHAEL E
JANN P C
HARVEY DAVID J
BELL WILLIAM
TSAI BIN-MING BENJAMIN
NOVAK WALTER THOMAS
WIHL MARK J
Application Number:
JP2001279721A
Publication Date:
June 21, 2002
Filing Date:
October 31, 1990
Export Citation:
Assignee:
KLA INSTR CORP
International Classes:
G01B11/30; G01N21/88; G01N21/93; G01N21/956; G01R31/308; G06T1/00; G01B11/24; G06T1/20; G01N21/64; (IPC1-7): G01B11/24; G01N21/88; G01N21/93; G01N21/956; G06T1/00; G06T1/20
Attorney, Agent or Firm:
Fuse Yukio (2 outside)