AUTOMATIC FOCUS FUNCTION OF SCANNING ELECTRON MICROSCOPE

Title:

AUTOMATIC FOCUS FUNCTION OF SCANNING ELECTRON MICROSCOPE

Document Type and Number:

Japanese Patent JP2002042706

Kind Code:

A

Abstract:

To provide an image having focused over a whole area of an object having height difference out of a focus depth.

An exciting current map adjusted to a shape of sample is prepared from a plurality of focus position images by image processing and an observation picture is photographed by varying a focus position while referring to a focus position map.

Inventors:

WADA MASAJI
YASUKOCHI MASAYA
TAKANE ATSUSHI

Application Number:

JP2000229023A

Publication Date:

February 08, 2002

Filing Date:

July 25, 2000

Export Citation:

Click for automatic bibliography generation Help

Assignee:

HITACHI LTD

International Classes:

G01N23/225; G02B7/28; H01J37/141; H01J37/21; H01J37/22; H01J37/28; (IPC1-7): H01J37/141; G01N23/225; G02B7/28; H01J37/21; H01J37/22; H01J37/28

Attorney, Agent or Firm:

Sakuta Yasuo

Previous Patent: TRANSMISSIVE RADIATION TYPE X-RAY TUBE AND MANUFACTURING METHOD THEREOF

Next Patent: ASTIGMATISM CORRECTION DEVICE