Title:
AUTOMATIC GUIDED VEHICLE
Document Type and Number:
Japanese Patent JP3814159
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve working efficiency in an automatic guided vehicle for automatically carrying and transferring semiconductor wafers between stations in a semiconductor-manufacturing factory or the like.
SOLUTION: A transfer apparatus 3 for transferring a wafer 10, an attitude- matching apparatus 4 for aligning the attitude and direction of the wafer 10, and a buffer cassette 5 for accommodating plural wafers 10 are mounted to the automatic guided vehicle 1. The transfer apparatus 3 is arranged at the center of the automatic guided vehicle 1. Then, the attitude-matching apparatus 4 and the buffer cassette 5 are arranged before and after the transfer apparatus 3.
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Inventors:
Fukuda Isao
Shuji Akiyama
Shuji Akiyama
Application Number:
JP2001121023A
Publication Date:
August 23, 2006
Filing Date:
April 19, 2001
Export Citation:
Assignee:
村田機械株式会社
東京エレクトロン株式会社
東京エレクトロン株式会社
International Classes:
B61B13/00; H01L21/677; B65G1/00; H01L21/68; (IPC1-7): H01L21/68; B61B13/00; B65G1/00
Domestic Patent References:
| JP11274264A | ||||
| JP2000042951A | ||||
| JP2000200810A |
Attorney, Agent or Firm:
Juichiro Yano